||Advanced characterization of micro optical components with atomic force microscopy
||Borsetto, Francesca (Univ. of Padova, Italy)
||Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
||There, at present, is a growing need for measurement methods and facilities that can back up advanced industrial needs in research, development, production and quality control within micro optics.
The project is focused on the exact determination of the profile of grating structures, key components in micro optics.
Functionality of these components is dramatically dependent on dimensional and shape accuracy.
The measurement technique used ´was Atomic Force Microscopy ( AFM).
Requirements concerning accuracy were ensured by appropriate calibration procedures.
Vertical calibration of the AFM scanner
Vertical squareness calibration (Y, Z)
were developed within the project.
Correction coefficients (from calibration), were eventually used in connection with two gratings.
Measurement uncertainties down to 20 nm were achieved.
||Institut for Produktion og Ledelse, DTU
Creation date: 2006-06-22
Update date: 2007-02-24