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Title Nanoimprint Lithography Process Optimization
Author Pedersen, Rasmus Haugstrup
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2005
Pages 132
Admin Creation date: 2006-06-22    Update date: 2007-02-24    Source: dtu    ID: 182320    Original MXD