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Title Multiscale Geometrical Metrology
Author Merzari, Fabio
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2005
Abstract This project concerns evaluation of procedures for the calibration and verification of measuring machines operating at different scales. This work has encompassed activities regarding an optical coordinate measuring machine (CMM) as well as an Atomic Force Microscope (AFM) integrated on a CMM. A measurement procedure for the calibration of CMM was applied to an optical coordinate measuring machine using as reference artefact the CGM hole plate, that can be used both with optical and mechanical machines, and a qualitative evaluation of the optical CMM performances was carried out. A mean deviation of 1,13 µm from the reference values has been found. Moreover, a measuring method to evaluate length measurement uncertainty was also developed together with a software package as a "user friendly" tool for laboratory as well as industrial CMM performance verification. The software was tested by several industrial companies. This tool is intended for both mechanical and optical coordinate measuring machines. A Large Range AFM has been investigated and deeply analyzed during this project too. In particular, measurements have been carried out to evaluate the lateral calibration of the AFM and "thermal drift" which has been found to be in the order of magnitude of hundredth of nm/sec after few hours the scan is started. Finally, roll errors assessment of the CMM belonging to the Large Range AFM has been carried out. The measured value of roll errors along the X-axis is 4,19 ± 6,82µrad and -2,21 ± 7,13µrad along the Y-axis.
Imprint Institut for Produktion og Ledelse, DTU
Pages 170
Keywords MM05.09
Admin Creation date: 2006-06-22    Update date: 2008-01-11    Source: dtu    ID: 187335    Original MXD