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Title Integration of screen printed PZT in MEMS
Author Hindrichsen, Christian Carstensen (MEMS-AppliedSensors, MIC- Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Hansen, Ole (Microreactors, MIC- Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Supervisor Thomsen, Erik Vilain (MEMS-AppliedSensors, MIC- Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2006
Pages 119
Admin Creation date: 2006-12-15    Update date: 2007-02-24    Source: dtu    ID: 193229    Original MXD