Beta 1


Title Corrosion resistant capacitive pressure sensor
Author Pedersen, Thomas (MEMS-AppliedSensors, MIC- Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Supervisor Thomsen, Erik Vilain (MEMS-AppliedSensors, MIC- Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2006
Pages 152
Admin Creation date: 2006-12-15    Update date: 2007-03-27    Source: dtu    ID: 193235    Original MXD