Beta 1


Title MEMS ultasonic scannerhead
Author Hansen, Christian (MEMS-AppliedSensors, MIC- Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Supervisor Thomsen, Erik Vilain (MEMS-AppliedSensors, MIC- Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2007
Pages 119
Admin Creation date: 2007-12-11    Update date: 2007-12-11    Source: dtu    ID: 207640    Original MXD