Beta 1


Title Soft Magnetic Actuator membranes - Development and Fabrication of a Stepped Membrane
Author Andersen, Lars Hutzen (Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2002
Pages 145
Admin Creation date: 2006-06-22    Update date: 2007-02-24    Source: dtu    ID: 61355    Original MXD