Beta 1


Title Wafer Bonding - Strukturelle Studier
Author Poulsen, Mette (Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2001
Pages 114
Admin Creation date: 2006-06-22    Update date: 2007-02-24    Source: dtu    ID: 61444    Original MXD