Beta 1


Title Oxidation of Silicon for the Fabrication of a Capillary Electrophoresis Device
Author Eriksson, Fredrik (Department of Micro and Nanotechnology, Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark)
Institution Technical University of Denmark, DTU, DK-2800 Kgs. Lyngby, Denmark
Thesis level Master's thesis
Year 2004
Imprint DK-2800 Kgs. Lyngby, Denmark
Admin Creation date: 2006-06-22    Update date: 2012-12-13    Source: dtu    ID: 61672    Original MXD